Vertical, disc-shaped single-piece graphite pedestals with surface SiC coating for silicon epitaxy equipment
Ultra-high purity graphite crucibles for single crystal silicon carbide production
Specialized semiconductor processing accessories:
- Graphite electrodes, backing blocks, and shielding covers for ion implantation
- Graphite electrodes for plasma etching
- Molds, high-grade templates, and jigs for semiconductor packaging
High-temperature processing components:
- Graphite crucibles, boats, and accessories for induction heating
- Germanium oxide and zone-melted semiconductor material processing
- High-purity metal melting applications
- Graphite heaters and thermal insulation covers for Czochralski processes
High-purity graphite heaters and electrodes for HEM method sapphire production

Technical Specifications

Grade	Bulk Density (g/cm³)	Electric Resistivity (μΩ⋅m)	Compressive Strength (MPa)	Flexural Strength (MPa)	Shore Hardness	Ash Content (ppm)	Thermal Expansion (*10⁻⁶/°C)	Thermal Conductivity W/(m⋅K)	Young's Modulus (GPa)	Applications
CDI-S1	1.8	12.5	90	45	58	5	4.5	105	10	Semiconductor
CDI-S20	1.8	10	75	43	50	5	4.3	140	9	Semiconductor
CDI-S3	1.78	11	85	40	45	5	3.8	120	10	Semiconductor

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